全新 Edwards 排氣止回閥,適用於 IH、QDP、IQDP 乾泵、KF 40 法蘭 PN A44003000

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適用於 IH、QDP、IQDP 乾泵、KF 40 連接法蘭的新型 Edwards 排氣止回閥

這些 Edwards 真空幫浦排氣止回閥通常用於幫助防止空氣在斷電期間回流通過幫浦。它們只是一個單向閥,旨在抑制向後的氣流。即使安裝了這些止回閥之一,泵浦最終也會增加到大氣壓力。這些止回閥有助於防止製程粉末因大氣流而向後掃除。它們通常用於 Edwards 乾式半導體幫浦、iH、QDP 和幫浦。 iQDP 乾泵。

Ideal-Vacuum-Company-Image_med.pdf (Ideal-Vacuum-Company-Image_med.pdf, 7,973 Kb) [下載]

Edwards-iQDP-Dry-Pump-Operating-Instructions.pdf (Edwards-iQDP-Dry-Pump-Operating-Instructions.pdf, 1,968 Kb) [下載]

Edwards_DRYSTAR_QDP-40_QDP-80_Operating_Instructions.pdf (Edwards_DRYSTAR_QDP-40_QDP-80_Operating_Instructions.pdf, 2,049 Kb) [下載]

Edwards_Qdp_iQDP40_80_PartsList.pdf (Edwards_Qdp_iQDP40_80_PartsList.pdf, 706 Kb) [下載]

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