MKS HPS 901P Plus MicroPirani Piezo Loadlock Vacuum Transducer NW25, 10-5 to 1000 Torr

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MKS HPS® Series 901P Plus MicroPirani™ Piezo Loadlock Vacuum Transducer ISO-KF NW 25, RS-232 PN 901P-21030

The MKS HPS® Series 901P Plus Transducer has a combined sensor output that measures from 1x10^-5 to 1,000 Torr for monitoring pump-down cycles. This unique patented transducer is designed specifically for the loadlock environment, the 901 Plus (901P) replaces up to three sensors in one compact package. The 901P provides both pressure measurement and atmospheric switching capabilities, by integrating the MicroPirani™ and piezo sensor technologies. The differential sensor ensures accurate atmospheric pressure sensing under varying barometric pressure conditions, for optimum loadlock performance. Customers requiring both a power supply and display can use the 901P with the PDR900 Series Controller sold on this website. For complete specs and operation information See AVAILABLE DOWNLOADS below.

Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are a registered trademark of MKS Instruments, Inc.

MKS HPS® Series 901P Plus MicroPirani™ Piezo Loadlock Vacuum Transducer
Options, Part Number (PN):
ISO-KF NW 16, RS-232
PN 901P-11030
ISO-KF NW 16, RS-485
PN 901P-12030
ISO-KF NW 25, RS-232
PN 901P-21030
ISO-KF NW 25, RS-485
PN 901P-22030
4 VCR-F, RS-232
PN 901P-41030
4 VCR-F, RS-485
PN 901P-42030
8 VCR-F, RS-232
PN 901P-51030
8 VCR-F, RS-485
PN 901P-52030
ISO-KF NW 16 EXT, RS-232
PN 901P-81030
ISO-KF NW 16 EXT, RS-485
PN 901P-82030

HPS901ds.pdf (HPS901ds.pdf, 530 Kb) [Download]

901manual.pdf (901manual.pdf, 5,330 Kb) [Download]

901_pinOut_2.pdf (901_pinOut_2.pdf, 263 Kb) [Download]

900seriesDS.pdf (900seriesDS.pdf, 567 Kb) [Download]