Inficon 350-142 PSG502-S Digital Pirani Standard Gauge, CF-R(CF 1.33), Nickel Filament for Corrosive Applications, 2 Setpoints
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Inficon PN: 350-142
This Inficon PSG502-S digital Pirani standard gauge has an CF-R(CF 1.33) flanged mount, 2 setpoints and stainless steel measuring cell with Nickel filament for corrosive applications and metal-sealed feedthrough.
The Inficon PSG5xx series gauges feature a compact, streamlined design, with a rugged aluminum housing and replaceable stainless steel sensor cell, qualifying them for use on semiconductor systems and for standard applications, such as forelines.
Measurement range (air, 02, CO, N2) is 5 x 10-4 to 1000mbar (3.75 x 10-4 to 750 Torr). One tactile switch for ATM and HV makes adjustments simple.
PSG500 series gauges can mount in any orientation and logarithmic signal output through the RJ-45 connector makes integration easy.
The Inficon PSG5xx series digital Pirani standard gauges can be used with Inficon VGC501, VGC502 and VGC503 pressure gauge controllers and require a separate signal cable (P104428).
The Inficon PSG5xx series gauges feature a compact, streamlined design, with a rugged aluminum housing and replaceable stainless steel sensor cell, qualifying them for use on semiconductor systems and for standard applications, such as forelines.
Measurement range (air, 02, CO, N2) is 5 x 10-4 to 1000mbar (3.75 x 10-4 to 750 Torr). One tactile switch for ATM and HV makes adjustments simple.
PSG500 series gauges can mount in any orientation and logarithmic signal output through the RJ-45 connector makes integration easy.
The Inficon PSG5xx series digital Pirani standard gauges can be used with Inficon VGC501, VGC502 and VGC503 pressure gauge controllers and require a separate signal cable (P104428).
Dimensions:
- OAL: 84.3 mm (3.32 in)
- Width: 32.8 mm (1.29 in.)
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