MKS 148J All-Metal Flow Control Valve, 500 sccm, 4 VCR M Swagelok tube fitting, Viton Seals, PN: 148JA52CR1M
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MKS Part Number: 148JA52CR1M
When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-02000SV valve features a 2000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is <1x10-5 scc/sec He.
Swagelok-TM Swagelok Company
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