Edwards Novellus C3 Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, Dry Pumps, D37360360
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D37360360
Novellus C3 Micro TIM provides a tool interface to Novellus C3 platforms for dry pumps with a MicroTIM slot. A Novellus C3 Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Novellus C3 Micro TIM is compatible with the following Edwards pumps.
- EPX Series
- iGX Series
- GX Series
- iXH Series
- iXL Series
- Also for use on multi pump systems with a System Controller.
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