Edwards CTI Cryo-Torr 10 Vacuum Pump, 10 inch ANSI Cryopump, 3,000 l/s Air, 9,000 l/s Water Vapor. PN: 8116174G001

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Edwards CTI Cryo-Torr Cryopump 10 inch ANSI, (16 in OD) 3000 l/s Air, 9000 l/s Water, 5000 l/s Hydrogen, 2500 l/s Argon.
Edwards Part Number: 8116174G001.

The Edwards Cryo-Torr pump 10, is one of the two major components that make up the Cryo-Torr Pumping System. The second component is the Compressor (also sold on this website). This is the Cryo-Torr CTI 10 Pump, providing fast, clean pumping of all gases in the 10-3 to 10-9 Torr range. Standard applications include, Semiconductor, Aerospace & Vacuum coating as well as R&D. The cryopump operates on the principle that gases can be condensed and held at extremely low vapor pressures, achieving high speeds and throughputs. This Cryo-Torr 10 Pump is a highly-reliable and rugged unit that requires a minimum of servicing. Since the cryopump exposes no moving parts, operating fluids, or backing pumps to the vacuum, the possibility of system or process contamination from the cryopump itself is eliminated. This is the Cryo-Torr 10 Pump ONLY, compressors, cables, roughing pump and other accessories are available on this website.
Descripition, Installation, Regeneration, and Maintenance Procedures are totally covered in the Manual.pdf in the download section.

ON-BOARD-4-6-8-250-400-500-Brooks-Cryopump-Install-Maint-Manual.pdf (ON-BOARD-4-6-8-250-400-500-Brooks-Cryopump-Install-Maint-Manual.pdf, 1,163 Kb) [Download]

Cryo-Pumps_Install_1.pdf (Cryo-Pumps_Install_1.pdf, 941 Kb) [Download]

Brooks_CryoPump_Module_Programming_Operations.pdf (Brooks_CryoPump_Module_Programming_Operations.pdf, 1,301 Kb) [Download]

CTI-Cryo-Blanket-Heaters.pdf (CTI-Cryo-Blanket-Heaters.pdf, 429 Kb) [Download]

Brooks8200-Compressor-MAN_1.pdf (Brooks8200-Compressor-MAN_1.pdf, 995 Kb) [Download]

Cryo-Torr_9600_Compressor_1.pdf (Cryo-Torr_9600_Compressor_1.pdf, 1,750 Kb) [Download]

Cryo-Torr_Analog_Display_Temp_Indicator.pdf (Cryo-Torr_Analog_Display_Temp_Indicator.pdf, 44 Kb) [Download]

8040366_Three-Phase-Motor-Controller-Manual.pdf (8040366_Three-Phase-Motor-Controller-Manual.pdf, 565 Kb) [Download]

CTI-OnBoard-Programming-Op-Manual.pdf (CTI-OnBoard-Programming-Op-Manual.pdf, 1,301 Kb) [Download]

CTI-On-Board-Networking-of-Pumps.pdf (CTI-On-Board-Networking-of-Pumps.pdf, 1,537 Kb) [Download]

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CTI-8500-Compressor.pdf (CTI-8500-Compressor.pdf, 1,185 Kb) [Download]

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CVI_TorrMaster_TM500_Manual_1a.pdf (CVI_TorrMaster_TM500_Manual_1a.pdf, 647 Kb) [Download]

CTI_Cryo_SC_Compressor_1.pdf (CTI_Cryo_SC_Compressor_1.pdf, 1,229 Kb) [Download]

Edwards-Gas-Heater-Kit-Instructions_8080250K020.pdf (Edwards-Gas-Heater-Kit-Instructions_8080250K020.pdf, 179 Kb) [Download]

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