Ebara ESR20N-HT Multistage Dry Vacuum Pump, Pumping Speed 45 to 70 CFM (1300 - 2000 l/m), With Heated Silincer, Water Cooled, 3-Phase, 200-220V, 60Hz. PN: 203537
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Ebara Part Number: 203537.
The Ebara ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The Ebara ESR Series covers a wide pumping speed range from 35 to 1,625 CFM with an ultimate pressure as low as 1 mTorr. This listing is for the sale of the Ebara ESR20N-HT Multistage Dry Vacuum Pump, 120cfm 2000l/m, With Heated Silincer, Clean to Medium Duty Processes, Water Cooled, 200-220V / 3Ph, PN: 203537.
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Applications
- Sputtering
- PVD
- Load Lock and Transfer
- Ashing
- Ion Implanter
- Etch
- Clean Gases and Processes
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Benefits and Features of the Ebara EV-A series dry rotary lobe pumps.
- Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
- No Nitrogen purge required for ESR20N in clean applications
- Variable pumping speed to match application requirements
- High performance brushless DC motors
- State-of-the-art control and monitoring devices
- Idle mode can be employed for increased utility savings
- SEMI S2 assessed, NRTL Listed, CE Marked
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