DRY SEMICONDUCTOR PUMPS

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Edwards Maintenance Kit for CDP/QDP/iQDP 40/80 Pumps, PERFLUORINATED FOMBLIN GREASE PN: A526-40-820
$1,07055
On backorder
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Edwards MCM Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, GXS, CXS Dry Pumps, D37360320
$2,45166
In stock
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Edwards Novellus C3 Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, Dry Pumps, D37360360
$2,33825
In stock
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Edwards Piston O-Ring for iL 70 Pump 57mm PN 40801056 Sold as One Each
$11821
In stock
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Edwards Piston O-Ring for iL 70 Pump 64mm PN 40801055 Sold as One Each
$12047
In stock
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Edwards Piston O-Ring for iL 70 Pump 68mm PN 40802085 Sold as One Each
$13358
In stock
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Edwards QDP 40 & 80 or iQDP 40 & 80 LV HeadPlate for Semi Conductor Pumps A40090702
$2,27248
In stock
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Edwards QDP 40 & 80 or iQDP 40 & 80 LV Stage Stator for Semi Conductor Pumps A40101704
$2,29047
In stock
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Edwards QDP Pump Control Box Breaker 3 phase, 277 VAC, 25 Amp, Panel Mount
$35552
In stock
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Edwards QDP, iQDP, iH, & iL Water Connector Plug/Dust Cap, Female Quick Coupler, ISO B, 3/8
$1624
In stock
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Edwards QDP, iQDP, iH, & iL Water Connector, Female Quick Coupler 3/8- BH3-60
$13489
In stock
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Edwards QDP, iQDP, iH, & iL Water Connector, Male Quick Coupler 3/8
$8112
On backorder
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Edwards QDP-40 & iQDP-40 Intake O-ring - For the O-ring groove in the intake below the bolt down
$10249
In stock
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Edwards QDP-40 & QDP-80 Dry Semiconductor Vacuum Pump Cooling Coil Assembly PN 52840027
$1,68376
In stock
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Edwards QDP-40 & QDP-80 Dry Semiconductor Vacuum Pump Cooling Manifold TVC PN 52840029
$2,11400
In stock
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Edwards QDP-40 QDP-80 Semi-Conductor Pump Inner Ring 25X30X16
$9542
In stock
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Edwards QDP40 iQDP40 Semiconductor Vacuum Pump Motor Water Cooled, 2.2 kW D9OI C, A07113770
$2,72107
In stock
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Edwards QDP80 iQDP80 Semiconductor Vacuum Pump Motor Water Cooled, 6 kW D9OI C, A07115770
$3,88908
In stock
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Edwards Second Stage X Rotor for the IH 80 and IH 160 Vacuum Pumps
$68738
In stock
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Edwards Second Stage Y Rotor for the IH 80 and IH 160 Vacuum Pumps
$68738
In stock
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Edwards Semi E73 Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, Dry Pumps, D37360340
$3,52158
In stock
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Edwards Shim for IL70 Semiconductor Dry Vacuum Pump (10 in pack)
$9417
In stock
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Edwards SPI Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, Dry Pumps, D37360310
$2,68060
In stock
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Edwards TEL Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, Dry Pumps, D37360330
$2,33825
In stock
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